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发明名称
METHOD OF FORMING PHOTORESIST PATTERN
摘要
申请公布号
KR0179339(B1)
申请公布日期
1999.04.15
申请号
KR19950026650
申请日期
1995.08.25
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
YANG, HYUN-CHO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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