| 摘要 |
<p>The invention relates to a method of manufacturing a stamper for producing optical discs, comprising the application of a photoresist to a stamper plate and the structuring of the applied photoresist film, wherein said structuring comprises the successive exposer, development and heating of said photoresist film, wherein the developed photoresist film is subjected to an additional exposure step in the deep UV range prior to the final heat treatment. The effective dose of said additional exposure step ranges between 4.10-4 and 5.10?-2 J/cm2¿. The invention furthermore relates to a stamper and to an optical disc obtained by means of such a stamper.</p> |
