DRY ETCHING METHOD,申请号KR19910017259-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	KR0181513(B1)	申请公布日期	1999.04.15
申请号	KR19910017259	申请日期	1991.10.02
申请人	SONY CORP.	发明人	KADOMURA, SHINGO
分类号	H01L21/302;H01L21/3065;H01L21/3213;H01L29/78;(IPC1-7):H01L21/30	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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