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发明名称
Substrate for integrated components having a thin film and method of realisation
摘要
申请公布号
EP0665587(B1)
申请公布日期
1999.04.07
申请号
EP19950400149
申请日期
1995.01.24
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
BRUEL, MICHEL;BIASSE, BEATRICE
分类号
H01L21/02;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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