Keramischer Körper mit kleinen durchgehenden Löchern

摘要

A ceramic member having fine throughholes (1) is a unitarily sintered body. The ceramic member has a ceramic substrate (9) having at least one window (3) and a thin ceramic plate (7) laminated onto the substrate so as to cover the window, wherein the thin ceramic plate has a plurality of fine throughholes (1) at the portion(s) corresponding to the at least one window and each hole-to-hole distance is 70 mu m or less. This ceramic member having fine throughholes is made of a material of heat resistance, abrasion resistance and low thermal expansion and satisfies the requirements of high density, high precision and increased reliability to be possessed by such devices as an encoder, a high-precision fine electric field shutter, an ion current-controlling head, a scale and the like.