WASHING APPARATUS AND WASHING METHOD,申请号KR19920007937-传众专利搜索

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发明名称	WASHING APPARATUS AND WASHING METHOD
摘要
申请公布号	KR0175072(B1)	申请公布日期	1999.04.01
申请号	KR19920007937	申请日期	1992.05.08
申请人	TOKYO ELECTRON LTD.;TOKYO ELECTRON SAGA LTD.	发明人	MURAKAMI, SHINYA;KAMIKAWA, YUUJI;IZUMI, SINICHIRO;ANAI, NORIYUKI;SATOH, TAKAMI;SHIRAISHI, HIROFUMI;HARADA, KOJI;TOMOEDA, TAKAYUKI;TANAKA, HIROSHI
分类号	B08B3/02;C23G5/04;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/304	主分类号	B08B3/02
代理机构		代理人
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