| 摘要 |
The auxiliary apparatus comprises a base plate having a plurality of wiring portions on one face, a plurality of probes, and assembling means for assembling the probes in parallel to each other into the base plate. The assembling means presses the probes by a needle pressing portion extending in the arranging direction of the probes, bringing at least a part of deformed portions of the probes into contact with the wiring portions of the base plate, and each probe is pressed at the tip end of its needle front portion continued to one end of the deformed portion against an electrode portion of a device under inspection. Thereby, the probe is sandwiched between the base plate and the needle pressing portion to be maintained in that state and, in addition, scrapes off a film such as an oxide film existing in the electrode portion by the tip end of the needle front portion. The effective area of the probe is from the portion in contact with the wiring portion to the portion at the side of the needle tip and is smaller than the conventional probe.
|
