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发明名称
METHOD OF MANUFACTURING MICROPATTERN OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0172235(B1)
申请公布日期
1999.03.30
申请号
KR19950008136
申请日期
1995.04.07
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
BAE, SANG-MAN
分类号
(IPC1-7):H01L21/27
主分类号
(IPC1-7):H01L21/27
代理机构
代理人
主权项
地址
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