| 摘要 |
<p>PROBLEM TO BE SOLVED: To achieve the retention transportation device of a semiconductor chip for preventing blocking of a pipe and suction force of a suction-retaining tool from decreasing by automatically discharging dust clogged in a pipe and a filter, while the manufacturing facility of a semiconductor is being driven with a relatively simple method. SOLUTION: A first check valve 2 is provided closer to the side of a collet 1 than of a filter 4 of a vacuum pipe 6, a vacuum branch pipe is provided between the filter 4 and the first check valve 2, a second check valve 3 is provided at a side opposite to the vacuum pipe of the branch pipe, and a direction-switching valve 5 for switching at which a vacuum pipe 8 is connected to the vacuum pipe or to an air discharge port 9 is provided a side opposite the collet 1 rasher than the filter 4. Then, the direction-switching valve 5 is connected to the vacuum port 8, the first check valve 2 is opened, the second check valve 3 is closed, a semiconductor chip 10 is sucked and retained by the collet 1, the direction-switching valve 5 is connected to the air discharge port 9, the first check valve 2 is closed, and the second check valve 3 is opened, thus eliminating dust that is clogged in the filter 4.</p> |
