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发明名称
THIN FILM FORMING METHOD BY CVD
摘要
申请公布号
KR0172857(B1)
申请公布日期
1999.03.30
申请号
KR19950046372
申请日期
1995.12.04
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, DO-HYUNG;KIM, YOON-HEE
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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