发明名称 MICROMACHINED VIBRATORY RATE GYROSCOPE
摘要 <p>A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.</p>
申请公布号 EP0902876(A1) 申请公布日期 1999.03.24
申请号 EP19970931004 申请日期 1997.05.30
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 CLARK, WILLIAM, A.;JUNEAU, THOR;HOWE, ROGER, T.
分类号 G01C19/5719;(IPC1-7):G01C19/56 主分类号 G01C19/5719
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