| 摘要 |
PCT No. PCT/JP95/02361 Sec. 371 Date Jul. 17, 1996 Sec. 102(e) Date Jul. 17, 1996 PCT Filed Nov. 17, 1995 PCT Pub. No. WO96/16470 PCT Pub. Date May 30, 1996A method for control for a supersonic motor able to control torque independently and an apparatus for the same. In the invention, the mechanical inductance (L0) and mechanical capacitance (C0) are set so as to cancel each other out by series resonance so as to enable operation of the supersonic motor at the mechanical resonance point of its vibrator, (b) a parallel resonance tank circuit (23) is configured using the inductance (Ld) component provided at the outside of the supersonic motor so as to be cancelled out by an electrostatic capacitance (Cd) and use is made of a circuit comprised of a mechanical arm resistance of the supersonic motor and a torque-mirror circuit, and (c) a reference voltage corresponding to the reference torque is supplied to the piezoelectric actuators (13, 14) of the supersonic motor to control the torque of the supersonic motor. The voltage supplied to the piezoelectric actuators (13, 14) driving the vibrator (11) is proportional to the torque. By adding a speed control loop to the outside of the torque-mirror circuit, it is also possible to control the speed of the supersonic motor. Further, by adding a position control loop to the outside of the speed control loop, it is also possible to control the position of the supersonic motor.
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