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发明名称
WET ETCHING APPARATUS
摘要
申请公布号
KR0165321(B1)
申请公布日期
1999.03.20
申请号
KR19950059508
申请日期
1995.12.27
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, KWANG-YEUL;WOO, SANG-SUK;KANG, JUNG-HO
分类号
H01L21/306;(IPC1-7):G03F7/26
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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