STRAIN DIFFERENTIAL PRESSURE TRANSDUCER

摘要

FIELD: automatics, measurement technology. SUBSTANCE: invention is employed in small-sized semiconductor electromechanical converters of pressure difference of gaseous or liquid substances to electric signal. Strain differential pressure transducer has case, mounting platform forming sealed vacuumed chamber, instrument semiconductor pressure converters, insulated current leads arranged on platform. Instrument semiconductor pressure converters are manufactured in the form of two identical independent measurement modules made fast to mounting platform. Each of them has silicon substrate with recess forming membrane which planar surface carries sprayed resistance strain gauges. Mounting platform is fabricated in the form of disc with two through holes positioned in symmetry over its diameter. Measurement modules are so anchored on mounting platform that tail parts of their bases enter through holes of platform joining internal cavity of membrane with pipe union to apply pressure. Distance between longitudinal axes of measurement modules is found from relation between diameter of ring glass supporting member and diameter of mounting platform. EFFECT: provision for high measurement accuracy under complex operational conditions. 1 cl, 2 dwg