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发明名称
Herstellverfahren für ein Bitleitungskontaktloch einer Speicherzelle
摘要
申请公布号
DE59407764(D1)
申请公布日期
1999.03.18
申请号
DE19945007764
申请日期
1994.09.05
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
MELZNER, HANNO, DIPL.-PHYS., D-85655 GROSSHELFENDORF, DE
分类号
H01L21/768;H01L21/82;H01L27/108;(IPC1-7):H01L21/82
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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