Electron-beam continuous process vaporization installation for thermally high stressed substrata

摘要

The invention is an electron-beam vaporization installation for coating structural components made of extreme-heat-resistant alloys (super alloys), especially turbine blades, with so-called thermal barrier coatings. The invention divides the continuous process principle for this coating task with extreme thermal stress for the substrata. The invention divides the thermally high stressed chambers by a partition with a slot. As a result of this the heating chamber and the coating chamber are thermally decoupled from the room for the transport system of the substrata carriage. A further characteristic of the invention is that the carriage for the transport of the substrata through the installation is cooled. For this purpose at the specific work positions the cooling system of the carriage is coupled with the exterior cooling circuits by a leakproof coupling system. The movement of the substrata is done hydraulically and is coupled with the exterior hydraulic circuits in a similar manner as the cooling system. The hydraulic medium is used also for cooling of the drive system. Diffusion pump oil is used as medium in all circuits to further reduce the possibility of affecting the residual gas.