| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a storage container for a wafer carrier, capable of executing processing for the storage container as an object within a short period of time and also simplifying the structure of equipment and setting for the storage container as the object. SOLUTION: This storage container is formed to have a single kind for a size of an outer shape of a wafer carrier 31 and plural kinds for an inside size of a containing part 33. Therefore, it is not necessary to adjust equipment and setting for the wafer carrier 31 as an object according to the outer shape thereof in spite of the fact that wafers 32 having plural kinds of sizes can be contained in a state of correct positioning without causing any shake. Thereby, processing for the wafer carrier 31 as the object can be executed within a short period of time, and the structure of equipment and setting for the wafer carrier 31 as the object is also simplified.</p> |
