SUBSTRATE TREATMENT CONTROL DEVICE AND CONTROL METHOD,申请号JP19970220859-传众专利搜索

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发明名称	SUBSTRATE TREATMENT CONTROL DEVICE AND CONTROL METHOD
摘要
申请公布号	JPH1154389(A)	申请公布日期	1999.02.26
申请号	JP19970220859	申请日期	1997.08.01
申请人	KOKUSAI ELECTRIC CO LTD	发明人	YOSHIDA YASUSHI
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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