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发明名称
Vorrichtung zum anisotropen Ätzen von Substraten
摘要
申请公布号
DE19734278(C1)
申请公布日期
1999.02.25
申请号
DE19971034278
申请日期
1997.08.07
申请人
ROBERT BOSCH GMBH, 70469 STUTTGART, DE
发明人
BECKER, VOLKER, 76359 MARXZELL, DE;LAERMER, FRANZ, DR., 70437 STUTTGART, DE;SCHILP, ANDREA, 73525 SCHWAEBISCH GMUEND, DE
分类号
H05H1/46;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H01L21/306;H01J37/317;C23C16/44
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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