发明名称 COATING LIQUID FOR FORMING LOW-PERMITTIVITY SILICA-BASED COATING FILM AND SUBSTRATE WITH COATING FILM
摘要 PROBLEM TO BE SOLVED: To obtain the subject coating liquid, having a low relative permittivity and excellent in adhesion to surfaces to be coated, mechanical strength and chemical resistance such as alkali resistance by including a reactional product of a polyether-modified silicone oil with a hydrolyze of an alkoxysilane or the like. SOLUTION: Theis coating liquid is obtained by including a reactional product prepared by mixing (A) a polyether-modified silicone oil preferably represented by the formula [R' is 0(R2 -0)a R1 ,θ(R2 -θ)a (R3 -θ)b R1 R1 is H, a 1-8C hydrocarbon or the like; R2 and R3 are each a 1-8C hydrocarbon; (a) and (b) are each an integer} or the like] with (B) a hydrolyzate of an alkoxysilane represented by the formula Xn Si(OR)4-n [X is H, F, a 1-8C alkyl or the like; R is a 1-8C alkyl, an aryl or the like; (n) is 0-3] or a halogenated silane represented by the formula Xn SiX'4-n (X' is chlorine or bromine) and then preferably heat- treating the resultant mixture at <=80 deg.C for 0.5-3 hr.
申请公布号 JPH1150007(A) 申请公布日期 1999.02.23
申请号 JP19970213344 申请日期 1997.08.07
申请人 CATALYSTS & CHEM IND CO LTD 发明人 NAKAJIMA AKIRA;INOUE KAZUAKI;TOUNAI ATSUSHI;KOMATSU MICHIO
分类号 G02F1/136;C08L83/06;C09D183/06;G02F1/1368;H01L21/316;H05K3/46;(IPC1-7):C09D183/06 主分类号 G02F1/136
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