| 摘要 |
The plate shaped target includes a frame (3, 4, 5, 7) which at least partially surrounds the target material (23) and holds the target on the cathode back plate. The frame incorporates hollow sections (3a, 4a,..7a') which are located laterally, are symmetrical about the middle plane (S) of the target, and serve as cooling channels. To produce the target, the frame made preferably of copper is placed onto a horizontal plane plate (preferably of stainless steel), is fixed to this plate, and is then filled with a molten target material. After solidification and cooling the target is fixed to the cathode back plate.
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