发明名称 |
STATISTICALLY CALCULATING METHOD BY USING RANDOM NUMBER AND MEASURING METHOD OF CONCENTRATION DISTRIBUTION BY USING THE METHOD |
摘要 |
<p>PROBLEM TO BE SOLVED: To remove errors from the results of measurement containing a theoretical measurement error factor attributed to a measuring method by inversely convoluting and integrating an actual measured value with the results of calculation obtained employing a method of statistic calculation using a random number. SOLUTION: An actual measurement is performed and the composition of an object to be measured, the type of a primary beam, an angle of incidence, incident energy and the like are recorded. The results of the measurement of a concentration distribution are stored into a file fl as a function Csims (x) of the depth direction (x). Then, a simulation is performed to reproduce a measurement on a calculator for a structure in which elements to be measured are distributed in a manner of a delta function. The number of secondary ions or particles released for a certain period of time during which a primary beam is irradiated is calculated by a method of a systematic calculation using an interatomic potential, a formula of an energy loss in a solid and a random number with respect to an assumed delta function distribution of impurities to be measured. The results and an actual measured value are inversely convoluted and integrated to obtain a distribution of concentration.</p> |
申请公布号 |
JPH1137961(A) |
申请公布日期 |
1999.02.12 |
申请号 |
JP19970188608 |
申请日期 |
1997.07.14 |
申请人 |
N II C JOHO SYST:KK;NEC CORP |
发明人 |
HANE MASAMI;IKEZAWA TAKEO |
分类号 |
G01N23/225;H01J37/244;H01J37/252;(IPC1-7):G01N23/225 |
主分类号 |
G01N23/225 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|