| 摘要 |
PURPOSE:To attain inspection with high accuracy and high density by providing an elliptic mirror condensing a light which is scanned with an oscillator and passed thru through-holes arranged on a work, to photoelectric conversion element arranged in a focusing point. CONSTITUTION:The elliptic mirror 7 is provided in the upper direction of a table 2 so as to orthogonally cross in the movable direction of the table 2 and fixed on the position covering out the inspecting area of a green sheet 21. The photoelectric conversion element 8 is arranged on the focus of mirror 7, and the oscillator 6 scanning the light from a parallel light source 5 in the right angle direction against the moving direction of table 2 is arranged on another focus. When the table 2 is driven 4 to one direction, the light scanned with the oscillator 6 is condensed by the mirror 7 after transmitting the through- holes 22, then projected to the element 8. By a signal processing device 9, positions of the holes 22 in the scanning direction are detected based on a signal from the element 8 and a scanning signal of the oscillator 6. By a control device 10, positions of the holes 22 on a plane against the sheet 21 are detected based on data of the device 9 and of a table driving mechanism 4. |
