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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH1126581(A)
申请公布日期
1999.01.29
申请号
JP19970181332
申请日期
1997.07.07
申请人
TOSHIBA CORP
发明人
SUNADA TAKESHI
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L21/3213;H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L21/321
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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