| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten the starting time of an alignment of an alignment device in a prober. SOLUTION: An alignment device 20 of an optical bridge comprises alignment bridge 22 mounting a camera for aligning a wafer W on a main chuck, a pair of right and left guide rods 23 supporting it movably between a probe center and a stand-by position upwardly of the main chuck, and a rodless air cylinder 24 arranged on any one of these sides and moving the alignment bridge 22 according to each guide rod 23. Further, a pair of right and left fixing rods is respectively projected in parallel to each guide rod 23 from both end parts of the alignment bridge 22, and also there is provided a permanent magnet which attracts respectively each of the fixing rods 29 and fixes the alignment bridge 22 at a probe center.</p> |
