| 摘要 |
The present invention provides a method for measuring the surface profile of a sample (8), the method including directing light from a light source (2) through a beam splitter (6) to form two split beams, directing the split beams onto a sample surface (8) and a reference surface (10) respectively, reflecting the split beams back through the beam splitter (6); and directing the split beams towards an imaging system (12). The invention also provides a surface profiling apparatus for measuring the surface profile of a sample (8), the apparatus including a light source (2) for generating a source beam, beam splitting means (6) positioned in the path of the source beam for splitting the source beam into split beams, a reference surface (10), a sample surface allowing the split beams to traverse separate paths and return to the beam splitting means (6), reference surface positioning means (14) for positioning the reference surface, and viewing means (12) for imaging combined beams. The invention also provides an apparatus for calibrating a laser for the ablation of a material including the surface profiling apparatus of the invention.
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