| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern inspection method and a pattern inspection device by which elements composed of different kinds of metals and circuit patterns can be inspected with comparatively simple constitution. SOLUTION: After being converted into a black-and-white variable density image video signal Ey by adjusting respective luminances by a luminance adjusting computing element 15 on color video signals EE, EG and EB from a color camera 7 picking up an image of an IC element 5a on a wafer 5 to avoid the excessive approach to a plurality of respective elements or the mutually adjacent distribution of the circuit pattern concentration distribution, the respective elements or circuit patterns are separated by an image processing processor 16, and are converted into a black-and-white variable density image. These method and device are also constituted so as to judge the existence of a defect part 18 by processing this black-and-white variable density image. |
