| 摘要 |
PROBLEM TO BE SOLVED: To prevent a large type photomask from being deflected and to make it thinner and lighter in weight by arranging a supporting body on a glass surface of the photomask at a position corresponding to a shielding part on a substrate. SOLUTION: A photomask 1 has a wall-like supporting body 2 made of metal, glass, etc., stuck on the glass surface side 1a. The supporting body 2 is arranged on a position corresponding to a shielding part (for example, chromium layer) 6 of between patterns 5 on a substrate side, and has a right angular peripheral part 2a and bridge parts 2b bringing the peripheral part 2a, and is formed, as a whole, like a square with a cross inside. Since the photomask 1 deflects most in the central part, the bridge part 2b can effectively prevent it from deflecting. A shielding layer 3 may be formed on the film surface 1b side of the photomask 1 facing the shielding part 6 of the substrate 4 side for improving a shielding effect. Further, if a pellicular film is formed on the surface of the supporting body as a reinforcement film, the photomask is supported by the supporting body 2 and increased in the strength. |
