| 摘要 |
<p>A storage, delivery and retrieval system (122) having a rear wall (112) to which is affixed a plurality of shelves (114) capable of supporting one or more wafer-carrying pods (132). The structure further includes a pair of vertical rails (116) lying in a plane spaced from and substantially parallel to the shelf-supporting wall (112). A horizontal rail (118) extends between and is translationally mounted to the vertical rails (116), which horizontal rail (118) supports a gripper (120) capable of movement along the horizontal rail (118). The movement of the horizontal rail (118) along the vertical rails (116), and the movement of the gripper (120) along the horizontal rail (118), allows the gripper (120) to be positioned at any location within an X-Z plane including the storage shelves (114). The system includes a two dimensional transport system. That is, all transport of the pods (132) by the system occurs without the pods leaving the X-Z plane of the shelves (114). This feature contributes to the overall small footprint of the system (122). Additionally, the gripper (120) moves around in the same plane as the pods (132), and the rails (116) have a small profile and operate directly adjacent the storage shelves (114). These features further contribute to the storage, delivery and retrieval system (122) according to the present invention.</p> |
