发明名称 |
Method of manufacturing diamond heat sink |
摘要 |
A diamond polycrystal body having metal films on its upper and lower surfaces is prepared. The diamond polycrystal body is cut in the vertical direction to form a diamond polycrystal body piece (1) having upper and lower surfaces and a cut surface connecting the upper and lower surfaces. The cut surface of diamond polycrystal body piece (1) is plasma-treated. A method of manufacturing a diamond heat sink removed of a damage layer on its cut surface and having prescribed insulation is thus provided. <IMAGE> |
申请公布号 |
EP0859409(A3) |
申请公布日期 |
1999.01.20 |
申请号 |
EP19980300865 |
申请日期 |
1998.02.05 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SHIOMI, HIROMU;KUMAZAWA, YOSHIAKI |
分类号 |
C04B41/88;C04B35/52;H01L21/48;H01L23/373 |
主分类号 |
C04B41/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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