发明名称 Method of manufacturing diamond heat sink
摘要 A diamond polycrystal body having metal films on its upper and lower surfaces is prepared. The diamond polycrystal body is cut in the vertical direction to form a diamond polycrystal body piece (1) having upper and lower surfaces and a cut surface connecting the upper and lower surfaces. The cut surface of diamond polycrystal body piece (1) is plasma-treated. A method of manufacturing a diamond heat sink removed of a damage layer on its cut surface and having prescribed insulation is thus provided. <IMAGE>
申请公布号 EP0859409(A3) 申请公布日期 1999.01.20
申请号 EP19980300865 申请日期 1998.02.05
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 SHIOMI, HIROMU;KUMAZAWA, YOSHIAKI
分类号 C04B41/88;C04B35/52;H01L21/48;H01L23/373 主分类号 C04B41/88
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