| 摘要 |
PROBLEM TO BE SOLVED: To form micropatterned crystal at a desired position without heating whole substrate by forming diamond crystal while irradiating laser beam at the position forming the crystal on the substrate. SOLUTION: As necessary, 50-200 V, preferably 100-150 V bias voltage is applied to a substrate 2 arranged on a substrate holder 5 and flame obtained by burning mixed gas of carbon-containing gases such as (halogenated) hydrocarbon, alcohols, ketones, CO and CO2 with gas such as N2 , H2 , O2 , H2 O, Ar or He is fed from a burner 1 onto the substrate 2 and simultaneously, laser beam is irradiated from YAG laser oscillator 6 through a light-collecting optical system 8 and a scanning mirror system 7 to the position forming diamond crystal on the substrate 2 so as to carry out vapor phase synthesis of diamond to form diamond crystal having severalμm to several hundredμm level micropattern shape.
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