发明名称 |
Substrate spin cleaning apparatus |
摘要 |
A substrate supporting device has a turntable mounted on a rotary shaft for supporting a substrate and spinning the substrate about a vertical axis. The turntable is replaceable by a load measuring device including a load meter mounted on a support bracket having a tube attachable to the rotary shaft. The load meter receives a cleaning brush to measure a pressing load applied therefrom. The load meter has a pressure sensor with an upper surface thereof at an equal level to the surface of the substrate to be placed on the substrate supporting device. Thus, a pressure to be applied to the substrate is measured in the same position as where the substrate is actually treated.
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申请公布号 |
US5860178(A) |
申请公布日期 |
1999.01.19 |
申请号 |
US19960625644 |
申请日期 |
1996.03.29 |
申请人 |
DAINIPPON SCREEN MFG. CO. LTD. |
发明人 |
NISHIMURA, JOICHI;SASAKI, TADASHI |
分类号 |
B08B1/00;B08B1/04;H01L21/00;H01L21/304;(IPC1-7):A46B13/04 |
主分类号 |
B08B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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