摘要 |
PCT No. PCT/EP94/02849 Sec. 371 Date Jun. 16, 1995 Sec. 102(e) Date Jun. 16, 1995 PCT Filed Aug. 29, 1994 PCT Pub. No. WO95/06954 PCT Pub. Date Mar. 9, 1995A magnetic field cathode for arc discharge vaporizers is described which has an inner ring coil associated with the target center and at least one outer ring coil associated with the peripheral region of the target, with the inwardly disposed ring coil surrounding a permanent magnet arranged at the center of the target and forming a field line concentrator together with this permanent magnet.
|