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发明名称
Verfahren zum AEtzen der Oberflaeche eines Halbleiterkoerpers
摘要
申请公布号
DE1119625(B)
申请公布日期
1961.12.14
申请号
DE1957T014042
申请日期
1957.08.24
申请人
SONY KABUSHIKI KAISHA
发明人
YAMAMOTO MIKIO;AMAYA AKIO
分类号
C23F1/40;H01L21/306
主分类号
C23F1/40
代理机构
代理人
主权项
地址
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