发明名称 TESTER FOR SEMICONDUCTOR DEVICES AND TEST TRAY USED FOR THE SAME
摘要 <p>An IC tester capable of shortening the time required until the testing of all the IC's finishes, wherein the depths (lengths in the direction of a Y-axis) of a thermostatted tank (4) and an exit chamber (5) are increased by a size substantially corresponding to the width (length of a shorter side) of a rectangular testing tray (3), and two parallel test tray transfer paths extending from a soaking chamber (41) in the tank (4) to the exit chamber (5) via a test section (42) in the tank (4) or a wide transfer path capable of simultaneously transferring two test trays arranged side-by-side in a direction crossing the two parallel test tray transfer paths are provided to enable two test trays to be transferred at once along the two parallel transfer paths or the wide transfer path.</p>
申请公布号 WO1999001776(P1) 申请公布日期 1999.01.14
申请号 JP1998002979 申请日期 1998.07.02
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