| 发明名称 |
Semiconductor device having conductor with aperture |
| 摘要 |
<p>Formed over a semiconductor substrate (1) having an element (Q) is a conductor (6) which has a hollow (6a) opposing the element. <IMAGE></p> |
| 申请公布号 |
EP0582306(B1) |
申请公布日期 |
1999.01.13 |
| 申请号 |
EP19930112605 |
申请日期 |
1993.08.05 |
| 申请人 |
NEC CORPORATION |
发明人 |
WATANABE, MASAYUKI |
| 分类号 |
G01R31/28;H01L21/3205;H01L21/66;H01L23/52;H01L23/528;(IPC1-7):H01L23/528 |
主分类号 |
G01R31/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
