| 摘要 |
PROBLEM TO BE SOLVED: To inhibit thermal deformation by sufficiently cooling a substrate, to prevent abnormal electric discharge, and to form a CVD film without interfering with film formation at the time of performing film formation by means of plasma CVD. SOLUTION: A thin metallic film is formed on a long-sized non-magnetic substrate. Then, a thin film is formed by means of plasma CVD on the thin metallic film while allowing the non-magnetic substrate to travel continuously along a cooling can. At this time, as the cooling can, the one prepared by forming an insulating layer 15 composed of ceramics to 0.3-1.0 mm on the whole surface of the outside peripheral surface of a metallic can 12 is used. |
