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发明名称
INSPECTION APPARATUS FOR DEFECT OF SUBSTRATE
摘要
申请公布号
JPH116803(A)
申请公布日期
1999.01.12
申请号
JP19970175302
申请日期
1997.06.16
申请人
NIKON CORP
发明人
OMORI TAKEO
分类号
G01B11/00;G01B11/30;G01N21/88;G01N21/956;(IPC1-7):G01N21/88
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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