| 摘要 |
A scheme for monitoring the performance of a gas-phase filter in which upstream and downstream detection surfaces are exposed to upstream and downstream air so that molecular contamination may respectively form non-volatile residue thereon, and the performance of the air filter is determined based on the ratio of the amount of non-volatile residue respectively forming on the upstream and downstream detection surfaces. In another embodiment, a first electrical signal is provided representative of the amount of non-volatile residue forming on the upstream detection surface, a second electrical signal is provided representative of the amount of non-volatile residue forming on the downstream detection surface, and the performance of the air filter is determined in real-time based on the first and second electrical signals that are provided. The detection surfaces of the upstream and downstream detectors may be selected so that the mass of non-volatile residue forming thereon may be determined, either in real-time or by subsequent chemical analysis.
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