申请人 |
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP |
发明人 |
ADOMI, KEIZO, C/O HANDOTAI ISOBE KENKYUSHO, ANNAKA-SHI, GUNMA-KEN, JP;NOTO, NOBUHIKO, C/O HANDOTAI ISOBE KENKYUSHO, ANNAKA-SHI, GUNMA-KEN, JP;TAKENAKA, TAKAO, C/O HANDOTAI ISOBE KENKYUSHO, ANNAKA-SHI, GUNMA-KEN, JP |