| 摘要 |
PROBLEM TO BE SOLVED: To make the time synchronized or obtain an equivalent effect, without affecting the operation of an apparatus. SOLUTION: Semiconductor aligners 202-1, 202-2 have means for controlling the operation of an apparatus, based on the time provided by the apparatus. A control means stores the fine given at a time by a host computer 201 and hour data of the attached to at this time or data corresponding to them and makes the time synchronized to the apparatus with that of the host computer, when this does not affect the operation of the apparatus. After the hour has been given at a certain time, it uses the time of the host computer obtd. from the stored data, as required. |
