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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH10321959(A)
申请公布日期
1998.12.04
申请号
JP19970128454
申请日期
1997.05.19
申请人
SHARP CORP
发明人
OBAYASHI TAKESHI
分类号
H01L21/205;H01L21/203;H01S5/00;(IPC1-7):H01S3/18
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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