MASK DEVICE, FILM DEPOSITION SYSTEM, TRANSFER DEVICE AND FILM DEPOSITION CONDITION DETERMINING METHOD,申请号JP19970125932-传众专利搜索

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发明名称	MASK DEVICE, FILM DEPOSITION SYSTEM, TRANSFER DEVICE AND FILM DEPOSITION CONDITION DETERMINING METHOD
摘要
申请公布号	JPH10321524(A)	申请公布日期	1998.12.04
申请号	JP19970125932	申请日期	1997.05.15
申请人	APPLIED MATERIALS INC	发明人	AITANI TERUKAZU;NAKAGAWA TOSHIYUKI;TANAKA KEIICHI;MAEDA YUJI
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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