MICROMINATURE ELECTROMECHANICAL APPARATUS CONTAINING ROTARY PLATE AND RELEVANT METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical rotary plate containing an improved actuator which allows necessary torque for causing rotation to be reduced. SOLUTION: The apparatus contains a second frame 52 which is suspended in the first opening in a first frame 50 and has a second opening, and a plate 54 suspended in the second opening. A first pair of beams 56 support the second frame along a first axial line relative to the first frame, so that the second frame is rotated around the first axial line relative to the first frame. A second pair of beams 58 support the plate along a second axial line relative to the second frame so that the plate is rotated around the second axial line relative to the frame. A first actuator 60 provides mechanical force for rotating the second frame along the first axial line relative to the first frame. A second actuator 62 provides mechanical force for rotating the plate along the second axial line relative to the second frame.