Vorrichtung zur Kontrolle einer Entwicklerlösung,申请号DE19926027343-传众专利搜索

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发明名称	Vorrichtung zur Kontrolle einer Entwicklerlösung
摘要
申请公布号	DE69227343(D1)	申请公布日期	1998.11.26
申请号	DE19926027343	申请日期	1992.08.07
申请人	HIRAMA RIKA KENKYUJO LTD., KAWASAKI, KANAGAWA, JP;NAGASE & CO., LTD., OSAKA, JP	发明人	NAKAGAWA, TOSHIMOTO, KAWASAKISHI, KANAGAWAKEN, JP;TSUKADA, KOUZO, YOKOHAMASHI, KANAGAWAKEN, JP;OGAWA, SHU, NAGAREYAMASHI, CHIBAKEN, JP;SHIOTSU, SHINICHIRO, TATSUNOSHI, HYOGOKEN, JP
分类号	G03F7/30;H01L21/027;H01L21/30;(IPC1-7):G03F7/30	主分类号	G03F7/30
代理机构		代理人
主权项
地址

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