发明名称 MODEL-BASED PREDICTIVE CONTROL OF THERMAL PROCESSING
摘要 <p>The predictive temperature control is based on a non-linear model and a multivariable temperature response is predicted using the non-linear model of a thermal process reactor. The non-linear model is implemented using a neural network and predictions are made in an auto-regressive moving average fashion with a receding prediction horizon. Model predictions are incorporated into a control law for estimating the optimum future control strategy. The high speed predictive nature of the controller renders it advantageous in multivariable rapid thermal processing reactors where fast response and high temperature uniformity are needed.</p>
申请公布号 EP0879547(A2) 申请公布日期 1998.11.25
申请号 EP19970904022 申请日期 1997.01.30
申请人 ASM AMERICA, INC. 发明人 DE WARD, HANK;DE KEYSER, ROBIN, M.;LU, ZHIMIN;DONALD, JAMES, J.
分类号 H01L21/26;G05B13/02;G05B13/04;G05D23/19;(IPC1-7):H05B1/02 主分类号 H01L21/26
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