申请人 |
DAINIPPON SCREEN MFG. CO., LTD., KYOTO, JP |
发明人 |
KITAKADO, RYUJI, C/O DAINIPPON SCREEN MFG. CO. LTD, HORIKAWA DORI, KAMIKYO-KU, KYOTO, JP;YANO, HIRONOBU, C/O DAINIPPON SCREEN MFG.CO. LTD., HORIKAWA DORI, KAMIKYO-KU, KYOTO, JP;KAKUMA, HIROAKI, C/O DAINIPPON SCREEN MFG. CO. LTD, HORIKAWA DORI, KAMIKYO-KU, KYOTO, JP;HOKI, TETSUO, C/O DAINIPPON SCREEN MFG. CO. LTD., HORIKAWA DORI, KAMIKYO-KU, KYOTO, JP;KANAI, TAKAO, C/O DAINIPPON SCREEN MFG. CO. LTD., HORIKAWA DORI, KAMIKYO-KU, KYOTO, JP |