| 摘要 |
<p>A band narrowing laser having a band narrowing module which narrows by a band narrowing element a band of the laser beam generated from a laser medium, wherein a wavefront correction means (10) that corrects the wavefront of an incident laser beam and projects the corrected beam is installed in the band narrowing module (6) to produce a laser beam with a narrow and stable spectral line width.</p> |
