| 摘要 |
PROBLEM TO BE SOLVED: To abate the temperature drift of a sensor, in this angular velocity sensor detecting an angular velocity with a tuning fork-form vibrator consisting of a piezoelectric body. SOLUTION: A vibrator is formed into a nearly U-shaped tuning-fork form having a pair of arm parts 4, 5 and a connecting part 6 connecting one end of these arm parts 4 and 5. This vibrator is supported by a columnar part 3 extending to the opposite direction of these arm parts 4 and 5 from a nearly central part of the connecting part 6. Here, width (w) of this columnar part 3 is more than 0.5 times and less than 1.0 times of width (W0) of these arm parts 4 and 5, while thickness (t) of this columnar part 3 is more than 0.75 times over the thickness t0 of the arm parts 4 and 5, respectively. |
