| 摘要 |
PROBLEM TO BE SOLVED: To facilitate two beams aligning works by respectively adjusting focal positions of converging two beams independently in a radial direction and a a circumferential direction while mutually applying a delay time difference in between modulation signals. SOLUTION: An aligning means 110 uses the moving stage of one direction instead of an X-Y stage. That is, the means 110 performs an adjustment making position of a radial direction being the (r) direction of focal positions on a glass substrate coincide and a delay circuit 117 delays the modulation signals c-1 of the beam b-1 of an advancing side in order to make positions of the circumferential direction being the θ direction of the glass substrate coincide. Here, the delay time of the delay circuit 117 is calculated by dividing the angle difference in the circumferential direction of the substrate of the focal position of respective beams emitted from a condensing lens 113. Since the delaying of the modulation time does not give an influence to the radial direction but gives an influence only to the circumferential direction, position adjustments are performed easily. |
